英文大綱 |
1. Introduction to Vacuum Technology 1-1 Concept of Vacuum and Vacuum Pump 1-2 Vacuum Gauge 1-3 Vacuum Parts, Component and System 1-4 Leak and Leak Check
2. Introduction to Semiconductor Process Equipment 2-1 Physical and Chemical Vapor Deposition System 2-2 Dry and Wet Etching System 2-3 Track and Stepper 2-4 Chemically Machine Polishing 2-5 Ion Implanter 2-6 High Temperature Furnace
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